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Heriot Watt University — School of Engineering and Physical Sciences

Nanofabrication Facility

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Accurion Nanofilm EP4 Imaging Ellipsometer

Raith Pioneer Electron Beam Lithography System

Oxford Plasma Tech RIE Machine

Disco DAD 3220 Wafer Dicing Saw

Karl Suss Mask Aligners

Dektak Profileometer

AFM (Atomic Force Microscope)

Ultrasonic Wire Bonder

Zygo Optical Test Interferometer

Zygo Optical Test Interferometer

Quantum Photonics Laboratory
Heriot-Watt University
Edinburgh

Scottish registered charity number: SC000278

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